Our Research - Microelectromechanical Systems (MEMS)
Overview
We have extensive experience in MEMS design, characterization and application, and the commercial foundry manufacture of MEMS. Much of our research is in the area of optical MEMS with the goal of substituting conventional optical components with their MEMS equivalents in order to benefit from the advantages that optical MEMS can deliver namely low-cost, low-weight, free-space optical devices which can be integrated to yield miniaturized photonic communication, sensor and imaging systems. We also undertake research in the emerging area of optofluidics where microfluidics and optical devices are integrated to yield new types of optical and fibre-optic components.
Current projects
Optical MEMS for biomedical imaging
Mr Donnachie, Mr Bakas, Prof Uttamchandani, Dr Bauer
The aim of this project is the development of optical MEMS components for use in biomedical imaging setups. Active optical MEMS components, like micromirrors, will be designed for beam forming and image forming tasks during the project to allow miniaturisation of biomedical imaging systems while simultaneously adding functionalites through full digital control.
Optical MEMS for quantum optics
Mr Janin, Prof Uttamchandani, Prof Riis, Dr Bauer, Dr Griffin
This project investigates the application possibility of optical MEMS components in quantum optics settings. The benefits of active control, low-power consumption and small size of optical MEMS aims to feed into the development of miniaturised quantum optic components and sensors, with particular interest in cold atom applications and single atom sensing.
MEMS sensors
Dr Blue, Dr Bauer, Prof Uttamchandani
Our research is looking at using a cost-effective, reliable, multi-user MEMS fabrication possibility as tool for creating sensors for diverse applications, ranging from solid-state chemical sensors over novel flow sensor concepts to physical sensors for pressure or strain in a range of application settings.
MEMS microphones
Ms Zhang, Dr Bauer, Prof Uttamchandani, Prof Windmill
In this project novel bio-inspired MEMS microphones are developed and investigated, based on hearing principles of insects for directional sound localisation. Multiple MEMS sensing techniques are to be implemented in single devices and investigated, based on capacitive and piezoelectric sensors.